Optical grade high standard test piece
Specifications
| Optical grade high standard test piece | ||
| Step height standard | ||
| Size(um) | Size(nm) | Process |
| 1 | Chromium(New) | |
| 1.34 | Chromium(old) | |
| 3 | Chromium(New) | |
| 4.55 | Chromium(old) | |
| 9.8 | Chromium(old) | |
| 10 | Chromium(New) | |
| 10.4 | Chromium(old) | |
| 20 | Chromium(New) | |
| 50 | Chromium(New) | |
| 8 | Chromium(old) | |
| 30 | Chromium(old) | |
| 50 | Chromium(old) | |
| 52 | Chromium(old) | |
| 53 | Chromium(old) | |
| 63 | Chromium(old) | |
| 65 | Chromium(old) | |
| 250 | Chromium(old) | |
Applications
Optical calibration test piece for 3D scanning inspection. The purpose is for the calibration of 3D surface topography measurement.